Subnational COVID-19 Vaccination Data (Europe)

Hello, I am looking to assemble a subnational data set on COVID-19 vaccinations in Europe (preferrably at the level of NUTS-2 or NUTS-3 regions; mixed would also be okay). I have seen some maps for individual countries, so the data seems to be somewhere out there – at least for some. Does anyone know of any resources in that direction?

I’d like to focus on the EU27, but other European Countries are also fine. I appreciate any help, be it aggregate data sets or data for individual countries. Thanks!